Substrate to which film is formed and organic EL display device

ABSTRACT

On the TFT substrate ( 10 ), a vapor deposition layer is formed by use of a vapor deposition device ( 50 ) which includes (i) a vapor deposition source ( 85 ) having injection holes ( 86 ) and (ii) a vapor deposition mask ( 81 ) having openings ( 82 ) through which vapor deposition particles injected from the injection holes ( 86 ) are deposited so as to form the vapor deposition layer. The TFT substrate ( 10 ) has a plurality of pixels two-dimensionally arranged in a pixel region (A G ), and terminals of a plurality of wires ( 14 ), which are electrically connected with the plurality of pixels, are gathered outside a vapor deposition layer formation region.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a U.S. National Phase patent application of PCT/JP2012/050526,filed Jan. 12, 2012, which claims priority to Japanese PatentApplication No. 2011-008106, filed Jan. 18, 2011, each of which ishereby incorporated by reference in the present disclosure in itsentirety.

TECHNICAL FIELD

The present invention relates to a technique of vapor deposition forforming a film of a predetermined pattern on a film formation substrate.

BACKGROUND ART

Recent years have witnessed practical use of a flat-panel display invarious products and fields. This has led to a demand for a flat-paneldisplay that is larger in size, achieves higher image quality, andconsumes less power.

Under such circumstances, great attention has been drawn to an organicEL display device that (i) includes an organic electroluminescence(hereinafter abbreviated to “EL”) element which uses EL of an organicmaterial and that (ii) is an all-solid-state flat-panel display which isexcellent in, for example, low-voltage driving, high-speed response, andself-emitting.

An organic EL display device includes, for example, (i) a substrate madeup of members such as a glass substrate and TFTs (thin film transistors)provided to the glass substrate and (ii) organic EL elements provided onthe substrate and connected to the TFTs.

An organic EL element is a light-emitting element capable ofhigh-luminance light emission based on low-voltage direct-currentdriving, and includes in its structure a first electrode, an organic ELlayer, and a second electrode stacked on top of one another in thatorder, the first electrode being connected to a TFT. The organic ELlayer between the first electrode and the second electrode is an organiclayer including a stack of layers such as a hole injection layer, a holetransfer layer, an electron blocking layer, a luminescent layer, a holeblocking layer, an electron transfer layer, and an electron injectionlayer.

A full-color organic EL display device typically includes organic ELelements of red (R), green (G), and blue (B) as sub-pixels aligned on asubstrate. The full-color organic EL display device carries out an imagedisplay by, with use of TFTs, selectively causing the organic ELelements to each emit light with a desired luminance.

Such an organic EL display device is produced through a process thatforms, for each organic EL element serving as a light-emitting element,a pattern of a luminescent layer made of an organic luminescent materialwhich emits light of at least the above three colors (see, for example,Patent Literatures 1 and 2).

Such formation of a luminescent layer pattern is performed by a methodsuch as a vacuum vapor deposition method that uses a vapor depositionmask referred to as a shadow mask.

The production of, for example, a low-molecular organic EL display(OLED) has conventionally used a vapor deposition method involving ashadow mask, the vapor deposition method forming organic films (organiclayers) by selective application.

The vacuum vapor deposition method involving a shadow mask uses a shadowmask (full-cover contact type shadow mask) that is so sized as to allowvapor deposition to be performed throughout the entire vapor depositionregion of a substrate. The shadow mask is typically equivalent in sizeto the substrate.

FIG. 19 is a cross-sectional view schematically illustrating aconfiguration of a conventional vapor deposition device involving ashadow mask.

The vacuum vapor deposition method involving a shadow mask, asillustrated in FIG. 19, forms a pattern by (i) placing a substrate 301and a vapor deposition source 302 at such positions that the substrate301 and the vapor deposition source 302 face each other, (ii) forming,in a shadow mask 303, openings 304 corresponding to a pattern of aportion of a target vapor deposition region so that no vapor depositionparticles are adhered to a region other than the vapor depositionregion, and (iii) depositing vapor deposition particles onto thesubstrate 301 through the openings 304.

The substrate 301 is placed in a vacuum chamber (not shown). The vapordeposition source 302 is fixed below the substrate 301. The shadow mask303 is either fixed in close contact with the substrate 301 or movedrelative to the substrate 301 while the substrate 301 and the vapordeposition source 302 are fixed to an inner wall of the vacuum chamber.

Patent Literature 1, for example, discloses a method that involves aload-lock vapor deposition source, the method (i) aligning a mask and asubstrate with each other, next (ii) performing vacuum vapor depositionof a first luminescent material from directly below the substrate toform an arrangement of first light-emitting sections each substantiallyidentical in shape to an opening of the mask, then (iii) shifting themask, and (iv) performing vacuum vapor deposition of a secondluminescent material from directly below the substrate to form anarrangement of second light-emitting sections each substantiallyidentical in shape to the opening of the mask.

Patent Literature 2, for example, discloses a method for forming anelectrode pattern, the method (i) aligning, in a mask equivalent in sizeto a substrate, short-diameter holes or long and narrow slit pores in adirection which intersects a direction in which the mask is shifted and(ii) performing vapor deposition of an electrode material while the maskis shifted in a direction in which the short-diameter holes or slitpores are aligned.

In the vacuum vapor deposition method involving a shadow mask asdescribed above, the shadow mask is fixed (for example, welded) to amask frame under tension for prevention of, for example, bending anddistortion.

The vacuum vapor deposition method involving a shadow mask forms aluminescent layer pattern or an electrode pattern by (i) closelycontacting a shadow mask such as the above with a substrate and (ii)causing vapor deposition particles from a vapor deposition source to bedeposited (adhered) onto a desired position of the substrate through anopening of the shadow mask.

CITATION LIST

Patent Literature 1

Japanese Patent Application Publication, Tokukai, No. 2000-188179 A(Publication Date: Jul. 4, 2000) (corresponding U.S. Pat. No. 6,294,892(Publication Date: Sep. 25, 2001))

Patent Literature 2

Japanese Patent Application Publication, Tokukaihei, No. 10-102237 A(Publication Date: Apr. 21, 1998)

SUMMARY OF INVENTION Technical Problem

Unfortunately, a larger substrate size requires the shadow mask 303 tobe larger in size as well.

Such a larger size results in a gap opening between the substrate 301and the shadow mask 303 due to, for example, self-weight bending andelongation of the shadow mask 303. This makes it impossible to form apattern with high positional accuracy, and thus causes, for example,misplacement in vapor deposition and color mixture, thereby making itdifficult to achieve high resolution.

Further, a larger substrate size requires the shadow mask 303 and a maskframe that holds it to be both extremely large and heavy. This in turnrequires a device that uses the shadow mask 303 to be extremely largeand complex, which not only makes it difficult to design such a device,but also causes a safety problem in handling the shadow mask during aproduction step or a step such as replacing the shadow mask.

It is, in consequence, extremely difficult to form a pattern on alarge-sized substrate with use of a large-sized shadow mask.

A process of producing an organic EL display device requires a substratesize of approximately 1 m per side in order to use an existing massproduction process of the vapor deposition method involving a full-covercontact type shadow mask. It is difficult to use the vapor depositionmethod for a large-sized substrate having a substrate size larger thanapproximately 1 m per side. This indicates that there currently existsno established organic layer selective application technique that isusable for a large-sized substrate. It is thus impossible tomass-produce a large-sized organic EL display device of a 60-inch classor a larger size.

A larger substrate size normally allows a larger number of panels to beformed from a single substrate, and thus reduces the unit cost of apanel. This means that a larger sized substrate allows an organic ELdisplay device to be produced at a lower cost. Conventionally, however,the above constraint in substrate size has prevented production of alow-cost organic EL display device.

One solution to these problems is to reduce an area of the shadow mask303 by employing an arrangement in which vapor deposition is carried outby moving at least one of the substrate and the shadow mask 303 relativeto the other in a direction while securing a predetermined gap betweenthe substrate and the shadow mask 303.

However, such an arrangement causes the following problem.

Specifically, the substrate generally has a region on which vapordeposition particles need not to be vapor-deposited or a region on whichvapor deposition particles should not be vapor-deposited (these regionsare hereinafter referred to as “vapor deposition unnecessary region”).The vapor deposition unnecessary region is, for example, a connectionsection (terminal section) in which terminals for connection with anexternal circuit are gathered. No vapor deposition is carried out on theterminals, and thus the terminals are exposed.

The arrangement, in which the substrate is moved relative to the shadowmask so that vapor deposition is carried out throughout a region fromone end to the other end in a direction in which the substrate is moved,cannot establish good electrical connection between the connectionsection (terminal section) and the external circuit in a case where (i)a region on which the vapor deposition is carried out includes the vapordeposition unnecessary region and (ii) an organic film that has highelectrical resistance is formed by the vapor deposition.

One solution to this problem is to employ an arrangement in which vapordeposition is blocked by use of a shutter so that vapor deposition isnot carried out in the vapor deposition unnecessary region.

However, such an arrangement leaves, depending on, for example, a shapeof openings of a shadow mask, a region in which vapor deposition has notbeen carried out or a region in which vapor deposition has not beenfully completed when the vapor deposition is blocked. This results in aproblem that the organic film cannot have an appropriate thickness insuch a region.

Another solution is to wipe away the organic film with the use of anorganic solvent in a later step. However, such a method undesirablygenerates a residue of the organic solvent and introduces dust, and, asa consequence, decreases reliability of a product. In addition, such amethod necessitates another step of wiping away the organic film. Thismeans an increase in the number of steps, inviting an increase in timeand cost for production.

The present invention was accomplished in view of the above problems,and an object of the present invention is to provide a film formationsubstrate and an organic EL device each of which makes it possible toprevent vapor deposition in a vapor deposition unnecessary region whilepreventing or suppressing a decline in reliability of a product.

Solution to Problem

In order to attain the object, a film formation substrate of the presentinvention is a film formation substrate on which a vapor depositionlayer is formed by use of a vapor deposition device which includes (i) avapor deposition source having an injection hole from which vapordeposition particles are injected and (ii) a vapor deposition maskfacing the vapor deposition source and having an opening through whichthe vapor deposition particles injected from the injection hole aredeposited so as to form the vapor deposition layer, the film formationsubstrate including: a plurality of pixels two-dimensionally arranged ina pixel region; and a plurality of wires electrically connected to therespective plurality of pixels, the vapor deposition layer being formedin a vapor deposition layer formation region, which includes the pixelregion, by injecting the vapor deposition particles from the injectionhole while moving the film formation substrate relative to the vapordeposition mask in a moving direction so that the pixel region passes aregion facing the opening, and terminals of the plurality of wires beinggathered outside the vapor deposition layer formation region.

According to the invention, vapor-deposited films are formed by movingthe film formation substrate relative to the vapor deposition mask in adirection. This makes it possible to use a vapor deposition mask that issmall in size. Use of such a small-size vapor deposition mask does notcause problems, such as self-weight bending and elongation, which arisefrom an increase in size of a vapor deposition mask. It is thereforepossible to not only form a pattern of a vapor-deposited layer on alarge-sized substrate, but also form such a pattern with high positionalaccuracy and high resolution.

Further, use of such a small-size vapor deposition mask makes itpossible to suppress or prevent problems which occur in a case where anincrease in size of a vapor deposition mask causes a frame for holdingthe vapor deposition mask to be extremely large and extremely heavy.

In addition, the film formation substrate of the present invention hasthe pixel region in which the plurality of pixels which aretwo-dimensionally arranged, and the terminals of the plurality of wires,which are electrically connected with the respective plurality of pixelsin the pixel region, are gathered outside the vapor deposition layerformation region.

Accordingly, even by injecting the vapor deposition particles from theinjection holes while moving the film formation substrate relative tothe vapor deposition mask in a direction, no vapor-deposited layer isformed in regions where the terminals of the plurality of wires aregathered. It is therefore possible to provide a film formation substratewhich makes it possible to prevent vapor deposition in vapor depositionunnecessary regions while preventing or suppressing a decline inreliability of a product.

Advantageous Effects of Invention

As above described, the film formation substrate of the presentinvention is a film formation substrate on which a vapor depositionlayer is formed by use of a vapor deposition device which includes (i) avapor deposition source having an injection hole from which vapordeposition particles are injected and (ii) a vapor deposition maskfacing the vapor deposition source and having an opening through whichthe vapor deposition particles injected from the injection hole aredeposited so as to form the vapor deposition layer, the film formationsubstrate including: a plurality of pixels two-dimensionally arranged ina pixel region; and a plurality of wires electrically connected to therespective plurality of pixels, the vapor deposition layer being formedin a vapor deposition layer formation region, which includes the pixelregion, by injecting the vapor deposition particles from the injectionhole while moving the film formation substrate relative to the vapordeposition mask in a moving direction so that the pixel region passes aregion facing the opening, and terminals of the plurality of wires beinggathered outside the vapor deposition layer formation region.

The arrangement makes it possible to provide a film formation substratewhich makes it possible to prevent vapor deposition in a vapordeposition unnecessary region while preventing or suppressing a declinein reliability of a product.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a plan view illustrating a film formation substrate and a maskunit inside a vacuum chamber of a vapor deposition device according toan embodiment of the present invention, the plan view being taken from aback surface side of the film formation substrate.

FIG. 2 is a bird's eye view illustrating main constituent elementsinside the vacuum chamber of the vapor deposition device according tothe embodiment of the present invention.

FIG. 3 is a cross-sectional view schematically illustrating aconfiguration of a main part of the vapor deposition device according tothe embodiment of the present invention.

FIG. 4 is a block diagram partially illustrating a configuration of thevapor deposition device according to the embodiment of the presentinvention.

(a) through (c) of FIG. 5 are each a diagram illustrating example shapesof alignment markers provided to the film formation substrate and avapor deposition mask according to the embodiment of the presentinvention.

FIG. 6 is a cross-sectional view schematically illustrating aconfiguration of an organic EL display device for carrying out an RGBfull color display.

FIG. 7 is a plan view illustrating an arrangement of pixels constitutingthe organic EL display device illustrated in FIG. 6.

FIG. 8 is a cross-sectional view, taken along line A-A, illustrating aTFT substrate in the organic EL display device illustrated in FIG. 7.

FIG. 9 is a flowchart indicating successive steps for producing theorganic EL display device according to the embodiment of the presentinvention.

FIG. 10 is a flowchart indicating an example method for forming apredetermined pattern on a TFT substrate with use of the vapordeposition device according to the embodiment of the present invention.

FIG. 11 is a flowchart indicating an alignment adjustment method.

FIG. 12 is a view illustrating a configuration of a TFT circuit.

FIG. 13 is a view schematically illustrating how a TFT substrate isconfigured before formation of luminescent layers.

FIG. 14 is a view illustrating a state where the TFT substrate 10 sealedby a sealing substrate is about to be connected to a flexible filmcable.

FIG. 15 is a view illustrating a region around terminals of wires in avertical-side terminal section region.

FIG. 16 is a view illustrating how a plurality of wires are disposed.

FIG. 17 is a view illustrating a configuration of a TFT substrateaccording to the present embodiment.

FIG. 18 is a view schematically illustrating a configuration of a TFTsubstrate (film formation substrate) according to Second Embodiment.

FIG. 19 is a cross-sectional view schematically illustrating aconfiguration of a conventional vapor deposition device using a shadowmask.

DESCRIPTION OF EMBODIMENTS

An embodiment of the present invention is described below with referenceto FIGS. 1 through 18.

The present embodiment describes, as an example vapor deposition methodinvolving a vapor deposition device of the present embodiment, a methodfor producing an organic EL display device that (i) is of a bottomemission type, that is, extracts light from a TFT substrate side, andthat (ii) carries out an RGB full color display.

The description first deals with the overall configuration of theorganic EL display device.

FIG. 6 is a cross-sectional view schematically illustrating aconfiguration of the organic EL display device that carries out an RGBfull color display. FIG. 7 is a plan view illustrating an arrangement ofpixels included in the organic EL display device illustrated in FIG. 6.FIG. 8 is a cross-sectional view, taken long line A-A in FIG. 7, of aTFT substrate included in the organic EL display device illustrated inFIG. 6.

As illustrated in FIG. 6, the organic EL display device 1 produced inthe present embodiment includes: a TFT substrate 10 including TFTs 12(see FIG. 8); organic EL elements 20 provided on the TFT substrate 10and connected to the TFTs 12; an adhesive layer 30; and a sealingsubstrate 40, arranged in that order.

As illustrated in FIG. 6, the organic EL elements 20 are containedbetween the TFT substrate 10 and the sealing substrate 40 by attachingthe TFT substrate 10, on which the organic EL elements 20 are provided,to the sealing substrate 40 with use of the adhesive layer 30.

According to the organic EL display device 1, the organic EL elements 20are thus contained between the TFT substrate 10 and the sealingsubstrate 40, and this arrangement prevents infiltration of oxygen,moisture and the like present outside into the organic EL elements 20.

As illustrated in FIG. 8, the TFT substrate 10 includes, as a supportingsubstrate, a transparent insulating substrate 11 such as a glasssubstrate. The insulating substrate 11 is, as illustrated in FIG. 7,provided with a plurality of wires 14 including (i) a plurality of gatelines 14G (see FIG. 12) laid in the horizontal direction, (ii) aplurality of source lines 14S (see FIG. 12) laid in the verticaldirection and intersecting with the gate lines 14G, and (iii) powersupply wires 14V (see FIG. 12). The gate lines 14G are connected to agate line driving circuit (not shown in the drawings) that drives thegate lines 14G, whereas the signal lines are connected to a signal linedriving circuit (not shown in the drawings) that drives the signallines. How the wires 14 of the TFT substrate 10 of the presentembodiment are designed is described later.

The organic EL display device 1 is a full-color, active matrix organicEL display device. The organic EL display device 1 includes, on theinsulating substrate 11 and in regions defined by the wires 14,sub-pixels 2R, 2G, and 2B arranged in a matrix which include organic ELelements 20 of red (R), green (G), and blue (B), respectively.

In other words, the regions defined by the wires 14 each (i) correspondto a single sub-pixel (dot) and (ii) provide a luminescent region of R,G, or B for each sub-pixel.

A pixel 2 (that is, a single pixel) includes three sub-pixels: a redsub-pixel 2R transmitting red light; a green sub-pixel 2G transmittinggreen light; and a blue sub-pixel 2B transmitting blue light.

The sub-pixels 2R, 2G, and 2B include, as luminescent regions of therespective colors which luminescent regions perform light emission ofthe respective sub-pixels 2R, 2G, and 2B, openings 15R, 15G, and 15Bthat are covered respectively by stripe-shaped luminescent layers 23R,23G, and 23B of the respective colors.

The luminescent layers 23R, 23G, and 23B are each formed in a patternand color by vapor deposition. Note that the openings 15R, 15G, and 15Bwill be described later.

The sub-pixels 2R, 2G, and 2B include respective TFTs 12 each connectedto a first electrode 21 of a corresponding one of the organic ELelements 20. The sub-pixels 2R, 2G, and 2B each have an emissionintensity that is determined by scan through the wires 14 and selectionof the TFTs 12. As described above, the organic EL display device 1carries out an image display by selectively causing the organic ELelements 20 to emit, by use of the TFTs 12, light with desiredluminance.

The following describes in detail respective configurations of the TFTsubstrate 10 and each of the organic EL elements 20 both included in theorganic EL display device 1.

First, the description below deals with the TFT substrate 10.

The TFT substrate 10, as illustrated in FIG. 8, includes on thetransparent insulating substrate 11 such as a glass substrate: TFTs 12(switching elements); an interlayer film 13 (interlayer insulating film,planarizing film); wires 14; and an edge cover 15, formed in that order.

The insulating substrate 11 is provided thereon with (i) wires 14 and(ii) pixel driving circuits including TFTs 12 corresponding respectivelyto the sub-pixels 2R, 2G, and 2B. FIG. 12 is a diagram illustrating acircuit configuration of a pixel driving circuit.

As illustrated in FIG. 12, the pixel driving circuit includes atransistor Tr1 for control, a transistor Tr2 for driving, and acapacitor C.

A source terminal of the transistor Tr1 is connected to a source line14S, a gate terminal of the transistor Tr1 is connected to a gate line14G, and a drain terminal of the transistor Tr1 is connected to a gateterminal of the transistor Tr2.

A source terminal of the transistor Tr2 is connected to a power supplywire 14V, and a drain terminal of the transistor Tr2 is connected to theorganic EL element 20.

The capacitor C is provided between the source terminal of thetransistor Tr2 and the gate terminal of the transistor Tr2. Thecapacitor C is a capacitor for voltage retention.

When data is written into the pixel driving circuit having such aconfiguration, the gate line 14G becomes H (High), which causes thetransistor Tr1 to turn on. This allows a data voltage signal suppliedfrom the source line 14S to be written into the capacitor C. Then, thegate line 14G becomes L (Low), which causes the transistor Tr1 to turnoff. This cuts connection between the capacitor C and the source line14S, thereby allowing the capacitor C to retain the data voltage signalwritten therein when data is written into the pixel driving circuit.

An electric current of the transistor Tr2 is determined depending on avoltage between two ends of the capacitor C. Accordingly, an electriccurrent corresponding to the data voltage signal is supplied to theorganic EL element.

Each of the pixel driving circuits is not limited to the configurationdescribed above. Each of the pixel driving circuits may, for example,additionally include a circuit for compensating a variation and achange, with passage of time, in properties of the transistors Tr1 andTr2. Such an additional circuit may necessitate a wire other than thegate line 14G, the source line 14S, and the power supply wire 14V.

The interlayer film 13 is provided on the insulating substrate 11throughout the entire region of the insulating substrate 11 to cover theTFTs 12.

There are provided on the interlayer film 13 first electrodes 21 of theorganic EL elements 20.

The interlayer film 13 has contact holes 13 a for electricallyconnecting the first electrodes 21 of the organic EL elements 20 to theTFTs 12. This electrically connects the TFTs 12 to the organic ELelements 20 via the contact holes 13 a.

The edge cover 15 is an insulating layer for preventing the firstelectrode 21 and a second electrode 26 of a corresponding one of theorganic EL elements 20 from short-circuiting with each other due to, forexample, (i) a reduced thickness of the organic EL layer in an edgesection of the pattern of the first electrode 21 or (ii) an electricfield concentration.

The edge cover 15 is provided on the interlayer film 13 so as to coverthe edge sections of the pattern of the first electrode 21.

The edge cover 15 has openings 15R, 15G, and 15B for the sub-pixels 2R,2G, and 2B, respectively. The openings 15R, 15G, and 15B of the edgecover 15 define the respective luminescent regions of the sub-pixels 2R,2G, and 2B.

The sub-pixels 2R, 2G, and 2B are, in other words, isolated from oneanother by the insulating edge cover 15. The edge cover 15 thusfunctions as an element isolation film as well.

The description below now deals with each of the organic EL elements 20.

The organic EL element 20 is a light-emitting element capable ofhigh-luminance light emission based on low-voltage direct-currentdriving, and includes: a first electrode 21; an organic EL layer; and asecond electrode 26, stacked in that order.

The first electrode 21 is a layer having the function of injecting(supplying) positive holes into the organic EL layer. The firstelectrode 21 is, as described above, connected to the TFTs 12 via thecontact holes 13 a.

The organic EL layer provided between the first electrode 21 and thesecond electrode 26 includes, as illustrated in FIG. 8: a hole injectionlayer/hole transfer layer 22; luminescent layers 23R, 23G, and 23B; anelectron transfer layer 24; and an electron injection layer 25, formedin that order from the first electrode 21 side.

The above stack order intends to use (i) the first electrode 21 as ananode and (ii) the second electrode 26 as a cathode. The stack order ofthe organic EL layer is reversed in the case where the first electrode21 serves as a cathode and the second electrode 26 serves as an anode.

The hole injection layer has the function of increasing efficiency ininjecting positive holes into the luminescent layers 23R, 23G, and 23B.The hole transfer layer has the function of increasing efficiency intransferring positive holes to the luminescent layers 23R, 23G, and 23B.The hole injection layer/hole transfer layer 22 is so formed uniformlythroughout the entire display region of the TFT substrate 10 as to coverthe first electrode 21 and the edge cover 15.

The present embodiment describes an example case involving, as the holeinjection layer and the hole transfer layer, a hole injection layer/holetransfer layer 22 that integrally combines a hole injection layer with ahole transfer layer as described above. The present embodiment is,however, not limited to such an arrangement: The hole injection layerand the hole transfer layer may be provided as separate layersindependent of each other.

There are provided on the hole injection layer/hole transfer layer 22the luminescent layers 23R, 23G, and 23B so formed in correspondencewith the respective sub-pixels 2R, 2G, and 2B as to cover the respectiveopenings 15R, 15G, and 15B of the edge cover 15.

The luminescent layers 23R, 23G, and 23B are each a layer that has thefunction of emitting light by recombining (i) holes (positive holes)injected from the first electrode 21 side with (ii) electrons injectedfrom the second electrode 26 side. The luminescent layers 23R, 23G, and23B are each made of a material with high luminous efficiency, such as alow-molecular fluorescent dye and a metal complex.

The electron transfer layer 24 is a layer that has the function ofincreasing efficiency in transferring electrons from the secondelectrode 26 to the luminescent layers 23R, 23G, and 23B. The electroninjection layer 25 is a layer that has the function of increasingefficiency in injecting electrons from the second electrode 26 into theelectron transfer layer 24.

The electron transfer layer 24 is so provided on the luminescent layers23R, 23G, and 23B and the hole injection layer/hole transfer layer 22uniformly throughout the entire display region of the TFT substrate 10as to cover the luminescent layers 23R, 23G, and 23B and the holeinjection layer/hole transfer layer 22. The electron injection layer 25is so provided on the electron transfer layer 24 uniformly throughoutthe entire display region of the TFT substrate 10 as to cover theelectron transfer layer 24.

The electron transfer layer 24 and the electron injection layer 25 maybe provided either (i) as separate layers independent of each other asdescribed above or (ii) integrally with each other. In other words, theorganic EL display device may include an electron transferlayer/electron injection layer instead of the electron transfer layer 24and the electron injection layer 25.

The second electrode 26 is a layer having the function of injectingelectrons into the organic EL layer including the above organic layers.The second electrode 26 is so provided on the electron injection layer25 uniformly throughout the entire display region of the TFT substrate10 as to cover the electron injection layer 25.

The organic layers other than the luminescent layers 23R, 23G, and 23Bare not essential for the organic EL layer, and may thus be included asappropriate in accordance with a required property of the organic ELelement 20. The organic EL layer may further include a carrier blockinglayer according to need. The organic EL layer can, for example,additionally include, as a carrier blocking layer, a hole blocking layerbetween the luminescent layers 23R, 23G, and 23B and the electrontransfer layer 24 to prevent positive holes from transferring from theluminescent layers 23R, 23G, and 23B to the electron transfer layer 24and thus to improve luminous efficiency.

The organic EL element 20 can have, for example, any of the layeredstructures (1) through (8) below:

(1) first electrode/luminescent layer/second electrode

(2) first electrode/hole transfer layer/luminescent layer/electrontransfer layer/second electrode (3) first electrode/hole transferlayer/luminescent layer/hole blocking layer (carrier blockinglayer)/electron transfer layer/second electrode

(4) first electrode/hole transfer layer/luminescent layer/hole blockinglayer/electron transfer layer/electron injection layer/second electrode

(5) first electrode/hole injection layer/hole transfer layer/luminescentlayer/electron transfer layer/electron injection layer/second electrode

(6) first electrode/hole injection layer/hole transfer layer/luminescentlayer/hole blocking layer/electron transfer layer/second electrode

(7) first electrode/hole injection layer/hole transfer layer/luminescentlayer/hole blocking layer/electron transfer layer/electron injectionlayer/second electrode

(8) first electrode/hole injection layer/hole transfer layer/electronblocking layer (carrier blocking layer)/luminescent layer/hole blockinglayer/electron transfer layer/electron injection layer/second electrode

As described above, the hole injection layer and the hole transferlayer, for example, may be integrated with each other. The electrontransfer layer and the electron injection layer may be integrated witheach other.

The structure of the organic EL element 20 is not limited to the aboveexample layered structure, and may be a desired layered structureaccording to a required property of the organic EL element 20 asdescribed above.

The description below deals with a method for producing the organic ELdisplay device 1.

FIG. 9 is a flowchart indicating successive steps for producing theorganic EL display device 1.

As illustrated in FIG. 9, the method of the present embodiment forproducing the organic EL display device 1 includes steps such as a TFTsubstrate and first electrode preparing step (S1), a hole injectionlayer/hole transfer layer vapor deposition step (S2), a luminescentlayer vapor deposition step (S3), an electron transfer layer vapordeposition step (S4), an electron injection layer vapor deposition step(S5), a second electrode vapor deposition step (S6), and a sealing step(S7).

The following describes, with reference to the flowchart illustrated inFIG. 9, the individual steps described above with reference to FIGS. 7and 8.

Note, however, that the dimensions, materials, shapes and the like ofthe respective constituent elements described in the present embodimentmerely serve as an embodiment, and that the scope of the presentinvention should not be construed limitedly on the grounds of suchaspects of the constituent elements.

The stack order described in the present embodiment, as mentioned above,intends to use (i) the first electrode 21 as an anode and (ii) thesecond electrode 26 as a cathode. In the converse case where the firstelectrode 21 serves as a cathode and the second electrode 26 serves asan anode, the stack order of the organic EL layer is reversed, and therespective materials of the first electrode 21 and the second electrode26 are switched similarly.

First, as illustrated in FIG. 8, the method of the present embodiment(i) applies a photosensitive resin onto an insulating substrate 11 thatis made of a material such as glass and that includes, for example, TFTs12 and wires 14 each formed by a publicly known technique, and (ii)carries out patterning with respect to the photosensitive resin byphotolithography. This forms an interlayer film 13 on the insulatingsubstrate 11.

The insulating substrate 11 is, for example, a glass or plasticsubstrate having (i) a thickness of 0.7 to 1.1 mm, (ii) a length(longitudinal length) of 400 to 500 mm along a y axis direction, and(iii) a length (lateral length) of 300 to 400 mm along an x axisdirection. The insulating substrate 11 of the present embodiment was aglass substrate.

The interlayer film 13 can be made of, for example, an acrylic resin ora polyimide resin. The acrylic resin is, for example, a product in theOptomer series available from JSR Corporation. The polyimide resin is,for example, a product in the Photoneece series available from TorayIndustries, Inc. Note that since a typical polyimide resin is nottransparent but colored, the interlayer film 13 is more suitably made ofa transparency resin such as an acrylic resin in the case where anorganic EL display device of the bottom emission type is produced as theorganic EL display device 1 as illustrated in FIG. 8.

The interlayer film 13 is simply required to have a film thickness thatcan compensate for the difference in level created by the TFTs 12. Thefilm thickness is thus not particularly limited. The film thickness was,for example, approximately 2 μm in the present embodiment.

The method of the present embodiment next forms, in the interlayer film13, contact holes 13 a for electrically connecting the first electrode21 to the TFTs 12.

The method then forms, as a conductive film (electrode film), a filmsuch as an ITO (indium tin oxide) film by a method such as a sputteringmethod so that the film has a thickness of 100 nm.

The method next applies a photoresist onto the ITO film, carries outpatterning with respect to the photoresist by photolithography, and thencarries out etching with respect to the ITO film with use of ferricchloride as an etchant. The method then strips the photoresist with useof a resist exfoliative solution, and washes the substrate. This forms,on the interlayer film 13, a first electrode 21 in a matrix.

The conductive film material for the first electrode 21 is, for example,(i) a transparent conductive material such as ITO, IZO (indium zincoxide), and gallium-added zinc oxide (GZO) or (ii) a metal material suchas gold (Au), nickel (Ni), and platinum (Pt).

The above conductive film can be formed by, instead of the sputteringmethod, a method such as a vacuum vapor deposition method, a chemicalvapor deposition (CVD) method, a plasma CVD method, and a printingmethod.

The thickness of the first electrode 21 is not particularly limited. Thefirst electrode 21 can have a thickness of, for example, 100 nm asmentioned above.

The method next forms a pattern of an edge cover 15, as with theinterlayer film 13, to have a film thickness of, for example,approximately 1 μm. The edge cover 15 can be made of an insulatingmaterial similar to that for the interlayer film 13.

The step described above prepares the TFT substrate 10 and the firstelectrode 21 (S1).

The method of the present embodiment next carries out, with respect tothe TFT substrate 10 prepared through the above step, (i) a bake under areduced pressure for dehydration and (ii) an oxygen plasma treatment forsurface washing of the first electrode 21.

The method then carries out vapor deposition of a hole injection layerand a hole transfer layer (in the present embodiment, a hole injectionlayer/hole transfer layer 22) on the TFT substrate 10 throughout itsentire display region with use of a conventional vapor deposition device(S2).

Specifically, the method (i) carries out an alignment adjustment,relative to the TFT substrate 10, of an open mask having an openingcorresponding to the entire display region and (ii) closely attaches theopen mask to the TFT substrate 10. The method then, while rotating theTFT substrate 10 and the open mask together, carries out, through theopening of the open mask and uniformly throughout the entire displayregion, vapor deposition of vapor deposition particles scattered from avapor deposition source.

The above vapor deposition carried out throughout the entire displayregion refers to vapor deposition carried out unintermittently oversub-pixels having different colors and located adjacent to one another.

The hole injection layer and the hole transfer layer are each made of amaterial such as (i) benzine, styryl amine, triphenylamine, porphyrin,triazole, imidazole, oxadiazole, polyarylalkane, phenylenediamine,arylamine, oxazole, anthracene, fluorenone, hydrazone, stilbene,triphenylene, azatriphenylene, or a derivative of any of the above, (ii)a polysilane compound, (iii) a vinylcarbazole compound, (iv) and amonomer, an oligomer, or a polymer of an open chain conjugated system,such as a thiophene compound and an aniline compound.

The hole injection layer and the hole transfer layer may be eitherintegrated with each other as described above or formed as separatelayers independent of each other. The hole injection layer and the holetransfer layer each have a film thickness of, for example, 10 to 100 nm.

The present embodiment used, as the hole injection layer and the holetransfer layer, a hole injection layer/hole transfer layer 22 that wasmade of 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl(α-NPD) and thathad a film thickness of 30 nm.

The method of the present embodiment next carries out a selectiveapplication formation (pattern formation) of luminescent layers 23R,23G, and 23B on the hole injection layer/hole transfer layer 22 incorrespondence with respective sub-pixels 2R, 2G, and 2B so that theluminescent layers 23R, 23G, and 23B cover respective openings 15R, 15G,and 15B of the edge cover 15 (S3).

As described above, the luminescent layers 23R, 23G, and 23B are eachmade of a material with high luminous efficiency, such as alow-molecular fluorescent dye and a metal complex.

The luminescent layers 23R, 23G, and 23B are each made of a materialsuch as (i) anthracene, naphthalene, indene, phenanthrene, pyrene,naphthacene, triphenylene, anthracene, perylene, picene, fluoranthene,acephenanthrylene, pentaphene, pentacene, coronene, butadiene, coumarin,acridine, stilbene, or a derivative of any of the above, (ii) atris(8-hydroxyquinolinate) aluminum complex, (iii) abis(benzohydroxyquinolinate) beryllium complex, (iv) atri(dibenzoylmethyl)phenanthroline europium complex, (v) and ditoluoylvinyl biphenyl.

The luminescent layers 23R, 23G, and 23B each have a film thickness of,for example, 10 to 100 nm.

The vapor deposition method and the vapor deposition device of thepresent embodiment are each particularly suitably used for a selectiveapplication formation (pattern formation) of such luminescent layers23R, 23G, and 23B.

A description below deals in detail with a selective applicationformation of the luminescent layers 23R, 23G, and 23B which selectiveapplication formation involves the vapor deposition method and the vapordeposition device of the present embodiment.

The method of the present embodiment next carries out, in a mannersimilar to that described for the above hole injection layer/holetransfer layer vapor deposition step (S2), vapor deposition of anelectron transfer layer 24 throughout the entire display region of theTFT substrate 10 so that the electron transfer layer 24 covers the holeinjection layer/hole transfer layer 22 and the luminescent layers 23R,23G, and 23B (S4).

The method then carries out, in a manner similar to that described forthe above hole injection layer/hole transfer layer vapor deposition step(S2), vapor deposition of an electron injection layer 25 throughout theentire display region of the TFT substrate 10 so that the electroninjection layer 25 covers the electron transfer layer 24 (S5).

The electron transfer layer 24 and the electron injection layer 25 areeach made of a material such as a tris(8-hydroxyquinolinate) aluminumcomplex, an oxadiazole derivative, a triazole derivative, aphenylquinoxaline derivative, or a silole derivative.

Specific examples of the material include (i) Alq(tris(8-hydroxyquinoline)aluminum), anthracene, naphthalene, phenanthrene, pyrene,anthracene, perylene, butadiene, coumarin, acridine, stilbene,1,10-phenanthroline, and a derivative or metal complex of any of theabove, and (ii) LiF.

As mentioned above, the electron transfer layer 24 and the electroninjection layer 25 may be either integrated with each other or formed asseparate layers independent of each other. The electron transfer layer24 and the electron injection layer 25 each have a film thickness of,for example, 1 to 100 nm. The respective film thicknesses of theelectron transfer layer 24 and the electron injection layer 25 add upto, for example, 20 to 200 nm.

In the present embodiment, (i) the electron transfer layer 24 was madeof Alq, whereas the electron injection layer 25 was made of LiF, and(ii) the electron transfer layer 24 had a film thickness of 30 nm,whereas the electron injection layer 25 had a film thickness of 1 nm.

The method of the present embodiment next carries out, in a mannersimilar to that described for the above hole injection layer/holetransfer layer vapor deposition step (S2), vapor deposition of a secondelectrode 26 throughout the entire display region of the TFT substrate10 so that the second electrode 26 covers the electron injection layer25 (S6).

The second electrode 26 is suitably made of a material (electrodematerial) such as a metal with a small work function. Examples of suchan electrode material include a magnesium alloy (for example, MgAg), analuminum alloy (for example, AlLi, AlCa, or AlMg) and calcium metal. Thesecond electrode 26 has a thickness of, for example, 50 to 100 nm.

In the present embodiment, the second electrode 26 was made of aluminumand has a film thickness of 50 nm. The operation described above forms,on the TFT substrate 10, organic EL elements 20 each including theorganic EL layer, the first electrode 21, and the second electrode 26described above.

The method of the present embodiment then attached (i) the TFT substrate10, on which the organic EL elements 20 are provided, to (ii) a sealingsubstrate 40 with use of an adhesive layer 30 as illustrated in FIG. 6so that the organic EL elements 20 were contained.

The sealing substrate 40 is, for example, an insulating substrate suchas a glass substrate and a plastic substrate and 0.4 to 1.1 mm inthickness. The sealing substrate 40 of the present embodiment was aglass substrate.

The longitudinal and lateral lengths of the sealing substrate 40 mayeach be adjusted as appropriate in accordance with the size of a targetorganic EL display device 1. The sealing substrate 40 may be aninsulating substrate substantially equal in size to the insulatingsubstrate 11 of the TFT substrate 10, in which case a combination of thesealing substrate 40, the TFT substrate 10, and the organic EL elements20 contained therebetween is divided in accordance with the size of atarget organic EL display device 1.

The method for containing the organic EL elements 20 is not limited tothe method described above. Examples of other containing methods include(i) a method that uses a centrally depressed glass substrate as thesealing substrate 40 and that the combination of the sealing substrate40 and the TFT substrate 10 is sealed along the edge in a frame shapewith use of, for example, a sealing resin or fritted glass, and (ii) amethod that fills a space between the TFT substrate 10 and the sealingsubstrate 40 with a resin. The method for producing the organic ELdisplay device 1 does not depend on the above containing method, and canemploy any of various containing methods.

The second electrode 26 may be provided thereon with a protective film(not shown) that covers the second electrode 26 and that preventsinfiltration of oxygen, moisture and the like present outside into theorganic EL elements 20.

The protective film is made of an electrically insulating or conductivematerial such as silicon nitride and silicon oxide. The protective filmhas a thickness of, for example, 100 to 1000 nm.

Through the above steps, the organic EL display device 1 is finallyproduced.

The organic EL display device 1, upon receipt of a signal through a wire14, turns on a TFT 12 (turns on both a transistor Tr1 and a transistorTr2) and thus allows (i) positive holes to be injected from the firstelectrode 21 into the organic EL layer and further (ii) electrons to beinjected from the second electrode 26 into the organic EL layer. Thiscauses the positive holes and the electrons to recombine with each otherinside the luminescent layers 23R, 23G, and 23B. The positive holes andthe electrons thus recombined are emitted in the form of light whenbecoming inactive.

In the above organic EL display device 1, controlling respective lightemission luminances of the sub-pixels 2R, 2G, and 2B allows apredetermined image to be displayed.

The following describes an arrangement of a vapor deposition device ofthe present embodiment.

FIG. 1 is a plan view of a film formation substrate and a mask unit bothinside a vacuum chamber of the vapor deposition device of the presentembodiment, the plan view being taken from a back surface side of thefilm formation substrate (that is, the side opposite to thevapor-deposited surface). For convenience of illustration, FIG. 1 uses achain double-dashed line to represent the film formation substrate. FIG.2 is a bird's eye view of main constituent elements inside the vacuumchamber of the vapor deposition device of the present embodiment. FIG. 3is a cross-sectional view schematically illustrating a configuration ofa main part of the vapor deposition device of the present embodiment.FIG. 3 illustrates a cross section of the vapor deposition device, thecross section being taken along line B-B of FIG. 1. FIG. 4 is a blockdiagram illustrating a part of a configuration of the vapor depositiondevice of the present embodiment.

The vapor deposition device 50 of the present embodiment, as illustratedin FIG. 3, includes: a vacuum chamber 60 (film growing chamber); asubstrate moving mechanism 70 (substrate moving means; moving means); amask unit 80; image sensors 90; and a control circuit 100 (see FIG. 4).

As illustrated in FIG. 3, the vacuum chamber 60 contains the substratemoving mechanism 70 and the mask unit 80.

The vacuum chamber 60 is provided with a vacuum pump (not shown) forvacuum-pumping the vacuum chamber 60 via an exhaust port (not shown) ofthe vacuum chamber 60 to keep a vacuum in the vacuum chamber 60 duringvapor deposition.

The substrate moving mechanism 70 includes, for example: a substrateholding member 71 (substrate holding means) for holding a film formationsubstrate 200 (for example, a TFT substrate 10); and a motor 72 (seeFIG. 4).

The substrate moving mechanism 70 causes (i) the substrate holdingmember 71 to hold the film formation substrate 200 and (ii) abelow-described motor drive control section 103 (see FIG. 4) to drivethe motor 72 so as to hold the film formation substrate 200 and move itin the horizontal direction. The substrate moving mechanism 70 may beprovided to be capable of moving the film formation substrate 200 either(i) in both the x axis direction and the y axis direction or (ii) in oneof the x axis direction and the y axis direction.

The substrate holding member 71 is an electrostatic chuck. The filmformation substrate 200 is, in a state in which bend due to its ownweight is absent, so held by the electrostatic chuck as to be separatedfrom a below-described shadow mask 81 of the mask unit 80 by a fixed gapg1 (void; vertical distance).

The gap g1 between the film formation substrate 200 and the shadow mask81 preferably falls within the range of not less than 50 μm and not morethan 3 mm, or is more preferably on the order of 200 μm.

If the gap g1 is smaller than 50 μm, the film formation substrate 200will likely be come into contact with the shadow mask 81.

If the gap g1 is larger than 3 mm, vapor deposition particles that havepassed through openings 82 of the shadow mask 81 are spread widely,which results in a vapor-deposited film 211 being formed to have toolarge a pattern width. In the case where, for example, thevapor-deposited film 211 is the luminescent layer 23R, the gap g1 beinglarger than 3 mm may undesirably result in vapor deposition of thematerial of the luminescent layer 23R through the respective openings15G and 15B of the adjacent sub-pixels 2G and 2B.

With the gap g1 being approximately 200 μm, (i) there is no risk of thefilm formation substrate 200 coming into contact with the shadow mask81, and (ii) the vapor-deposited film 211 can have a sufficiently smallpattern width.

The mask unit 80, as illustrated in FIG. 3, includes: a shadow mask 81(vapor deposition mask, mask); a vapor deposition source 85; a maskholding member 87 (holding means); a mask tension mechanism 88; and ashutter 89 (see FIG. 4).

The shadow mask 81 is, for example, a metal mask.

The shadow mask 81 is so formed as to (i) be smaller in area than avapor deposition region 210 of the film formation substrate 200 and (ii)have at least one side that is shorter than the width of the vapordeposition region 210 of the film formation substrate 200.

The shadow mask 81 of the present embodiment has a rectangular shape(that is, in the shape of a belt), and is sized as follows: The shadowmask 81 is, as illustrated in FIG. 1, so formed as to have (i) longsides 81 a each with a width d1 (that is, the length along the long-sidedirection [long-axis direction] of the shadow mask 81) that is largerthan the width d3 of a side of the vapor deposition region 210 (in theexample illustrated in FIG. 1, a long side 210 a of the vapor depositionregion 210) which side faces the long sides 81 a of the shadow mask 81and (ii) short sides 81 b each with a width d2 (that is, the lengthalong the short-side direction [short-axis direction] of the shadow mask81) that is smaller than the width d4 of a side of the vapor depositionregion 210 (in the example illustrated in FIG. 1, a short side 210 b ofthe vapor deposition region 210) which side faces the short sides 81 bof the shadow mask 81.

The shadow mask 81, as illustrated in FIGS. 1 and 2, has a plurality ofopenings 82 (through holes) arranged in a one-dimensional direction andeach having the shape of, for example, a belt (that is, in a stripeshape). In the case where, for example, a selective applicationformation of the luminescent layers 23R, 23G, and 23B is carried outwith respect to the TFT substrate 10 as a pattern formation ofvapor-deposited films 211 (see FIG. 3) on the film formation substrate200, the openings 82 are formed in correspondence with the size andpitch of columns for each color of the luminescent layers 23R, 23G, and23B.

The shadow mask 81, as illustrated in FIG. 1, includes, for example,alignment marker sections 83 extending along a scanning direction(substrate scanning direction) of the film formation substrate 200. Thealignment marker sections 83 include respective alignment markers 84(see FIG. 3) for use in an alignment between the film formationsubstrate 200 and the shadow mask 81.

The alignment marker sections 83 of the present embodiment are, asillustrated in FIG. 1, provided along the short sides 81 b (short axis)of the shadow mask 81.

The shadow mask 81, as described above, has (i) long sides 81 a eachwith a width d1 that is larger than the width d3 of a side of the vapordeposition region 210 which side faces the long sides 81 a and (ii)short sides 81 b each with a width d2 that is smaller than the width d4of a side of the vapor deposition region 210 which side faces the shortsides 81 b. This arrangement allows the alignment marker sections 83 tobe formed respectively in opposite end sections arranged along thelong-side direction (that is, at the opposite short sides 81 b and 81b). The above arrangement thus makes it possible to carry out analignment easily and more precisely.

The film formation substrate 200, as illustrated in FIG. 1, includesalignment marker sections 220 outside the vapor deposition region 210and along the scanning direction (substrate scanning direction) of thefilm formation substrate 200. The alignment marker sections 220 includerespective alignment markers 221 (see FIG. 3) for use in an alignmentbetween the film formation substrate 200 and the shadow mask 81.

The alignment marker sections 220 of the present embodiment are, asillustrated in FIG. 1, provided along the respective short sides 210 b(short axis) of the vapor deposition region 210 of the film formationsubstrate 200.

The stripe-shaped openings 82 of the present embodiment are provided to(i) extend along the short side direction of the shadow mask 81, thatis, the substrate scanning direction, and to (ii) be arranged next toone another along the long side direction of the shadow mask 81, thatis, a direction that orthogonally crosses the substrate scanningdirection.

The vapor deposition source 85 is, for example, a container thatcontains a vapor deposition material. The vapor deposition source 85 is,as illustrated in FIGS. 1 through 3, (i) placed to face the shadow mask81 and (ii) separated from the shadow mask 81 by a fixed gap g2 (void),that is, positioned away from the shadow mask 81 by a fixed distance.

The vapor deposition source 85 may be a container that itself contains avapor deposition material or a container that includes a load-lock pipe.

The vapor deposition source 85 includes, for example, a mechanism foremitting vapor deposition particles upward.

The vapor deposition source 85 has, on a surface facing the shadow mask81, a plurality of injection holes 86 for emitting (scattering) thevapor deposition material in the form of vapor deposition particles.

The present embodiment is arranged, as described above, such that (i)the vapor deposition source 85 is provided below the film formationsubstrate 200 and that (ii) the film formation substrate 200 is held bythe substrate holding member 71 in such a state that the vapordeposition region 210 faces downward. Thus, in the present embodiment,the vapor deposition source 85 carries out vapor deposition of vapordeposition particles through the openings 82 of the shadow mask 81 ontothe film formation substrate 200 upward from below (that is, updeposition; hereinafter referred to as “depo-up”).

The injection holes 86 are, as illustrated in FIGS. 1 and 2, provided toface the respective openings 82 of the shadow mask 81 so as to be openin respective opening regions of the shadow mask 81. The injection holes86 of the present embodiment are arranged one-dimensionally (i) alongthe direction in which the openings 82 of the shadow mask 81 arearranged next to one another and (ii) so as to face the respectiveopenings 82 of the shadow mask 81.

Thus, as illustrated in FIGS. 1 and 2, the vapor deposition source 85 isformed to have a surface that faces the shadow mask 81, the surface(that is, the surface in which the injection holes 86 are provided)having, for example, a rectangular shape (belt shape) as viewed from theback surface side of the film formation substrate 200 (that is, in aplan view) so as to match the rectangular shape (belt shape) of theshadow mask 81.

In the mask unit 80, the shadow mask 81 and the vapor deposition source85 are fixed in position relative to each other. Specifically, there isconstantly a fixed gap g2 between (i) the shadow mask 81 and (ii) thesurface of the vapor deposition source 85 in which surface the injectionholes 86 are provided, and there is constantly a fixed positionalrelationship between (i) the openings 82 of the shadow mask 81 and (ii)the injection holes 86 of the vapor deposition source 85.

The injection holes 86 of the vapor deposition source 85 are each soplaced as to coincide with the center of a corresponding opening 82 ofthe shadow mask 81 when the mask unit 80 is viewed from the back surfaceside of the film formation substrate 200 (that is, in a plan view).

The shadow mask 81 and the vapor deposition source 85 are, for example,attached to the mask holding member 87 (for example, an identicalholder) for holding and fixing (i) the shadow mask 81 via the masktension mechanism 88 and (ii) the vapor deposition source 85 (see FIG.3). The shadow mask 81 and the vapor deposition source 85 are thus sointegrated with each other as to be held and fixed in the respectivepositions relative to each other.

The shadow mask 81 is under tension caused by the mask tension mechanism88. The shadow mask 81 is thus adjusted as appropriate so that no bendor elongation due to its own weight is caused.

The vapor deposition device 50 is arranged as described above such that(i) the film formation substrate 200 is adhered by suction to a fixingplate by the substrate holding member 71 (electrostatic chuck), and isthus prevented from being bent due to its own weight and (ii) the shadowmask 81 is under tension caused by the mask tension mechanism 88 so thatthe distance between the film formation substrate 200 and the shadowmask 81 is uniformly maintained throughout the entire region by whichthe film formation substrate 200 overlaps the shadow mask 81 in a planview.

The shutter 89 is used according to need in order to control reaching ofvapor deposition particles to the shadow mask 81. The shutter 89 iseither closed or opened by a shutter drive control section 105 (see FIG.4) in accordance with a vapor deposition OFF signal or vapor depositionON signal from a vapor deposition ON/OFF control section 104 (see FIG.4) described below.

The shutter 89 is, for example, provided to be capable of moving in aspace between the shadow mask 81 and the vapor deposition source 85(that is, capable of being inserted between them). The shutter 89 isinserted between the shadow mask 81 and the vapor deposition source 85to close the openings 82 of the shadow mask 81.

The vapor deposition device 50 is so adjusted that vapor depositionparticles from the vapor deposition source 85 are scattered below theshadow mask 81. The vapor deposition device 50 may be arranged such thatvapor deposition particles scattered beyond the shadow mask 81 areblocked as appropriate by, for example, a deposition preventing plate(shielding plate).

The vacuum chamber 60 is provided with, for example, image sensors 90(see FIG. 4) each (i) attached to an outer surface of the vacuum chamber60, (ii) including a CCD, and (iii) serving as image sensing means(image reading means). The vacuum chamber 60 is further provided with acontrol circuit 100 (i) attached to the outer surface of the vacuumchamber 60, (ii) connected to the image sensors 90, and (iii) serving ascontrol means.

The image sensors 90 each function as position detecting means for usein an alignment of the film formation substrate 200 and the shadow mask81.

The control circuit 100 includes: an image detecting section 101; acomputing section 102; a motor drive control section 103; a vapordeposition ON/OFF control section 104; and a shutter drive controlsection 105.

As described above, the film formation substrate 200 includes, asillustrated in FIG. 1, alignment marker sections 220 provided (i)outside the vapor deposition region 210 and (ii) along, for example, thesubstrate scanning direction. The alignment marker sections 220 eachinclude an alignment marker 221.

The image detecting section 101 detects, on the basis of an imagecaptured by the image sensors 90, respective images of (i) the alignmentmarkers 221 included in the film formation substrate 200 and (ii) thealignment markers 84 of the shadow mask 81. The image detecting section101 further detects the start end and rear end of the vapor depositionregion 210 of the film formation substrate 200 on the basis of, amongthe alignment markers 221 included in the film formation substrate 200,(i) a start-end marker indicative of the start end of the vapordeposition region 210 and (ii) a rear-end marker indicative of the rearend of the vapor deposition region 210.

The start-end marker and the rear-end marker mentioned above may beidentical to each other. In this case, the image detecting section 101detects, with respect to the substrate scanning direction, whether aparticular end of the vapor deposition region 210 is its start end orrear end.

The computing section 102 determines, from the image detected by theimage detecting section 101, the amount of movement of the filmformation substrate 200 and the shadow mask 81 relative to each other(for example, the amount of movement of the film formation substrate 200relative to the shadow mask 81). The computing section 102, for example,measures the amount of positional difference (that is, a shift componentalong the x axis direction and the y axis direction, and a rotationcomponent on the x-y plane) between the alignment markers 221 and thealignment markers 84 to determine a correction value for a substrateposition of the film formation substrate 200 by computation. In otherwords, the computing section 102 determines the correction value bycomputation with respect to (i) the direction perpendicular to thesubstrate scanning direction and (ii) a rotation direction of the filmformation substrate 200.

The rotation direction of the film formation substrate refers to adirection of rotation on the x-y plane about a z axis, serving as arotation axis, at the center of a film formation surface of the filmformation substrate 200.

The correction value is outputted in the form of a correction signal tothe motor drive control section 103. The motor drive control section103, on the basis of the correction signal from the computing section102, drives the motor 72 connected to the substrate holding member 71,and thus corrects the substrate position of the film formation substrate200.

How the substrate position is corrected with use of the alignmentmarkers 84 and 221 is described below together with example shapes ofthe alignment markers 84 and 221.

The motor drive control section 103 drives the motor 72 to move the filmformation substrate 200 in the horizontal direction as mentioned above.

The vapor deposition ON/OFF control section 104 generates (i) a vapordeposition OFF signal when the image detecting section 101 detects therear-end of the vapor deposition region 210 and (ii) a vapor depositionON signal when the image detecting section 101 detects the start-end ofthe vapor deposition region 210.

The shutter drive control section 105 (i) closes the shutter 89 uponreceipt of a vapor deposition OFF signal from the vapor depositionON/OFF control section 104 and (ii) opens the shutter 89 upon receipt ofa vapor deposition ON signal from the vapor deposition ON/OFF controlsection 104.

The following describes (i) how the substrate position is corrected withuse of the alignment markers 84 and 221 and (ii) example shapes of thealignment markers 84 and 221.

(a) through (c) of FIG. 5 illustrate example shapes of the alignmentmarkers 84 and 221. (b) and (c) of FIG. 5 each illustrate only two ofthe juxtaposed alignment markers 84 and of the juxtaposed alignmentmarkers 221 for convenience of illustration.

The computing section 102, on the basis of an image of the alignmentmarkers 84 and 221, the image having been detected by the imagedetecting section 101, measures (determines) (i) a distance r betweenrespective ends (outer edges) of each alignment marker 84 and itscorresponding alignment marker 221 along the x axis direction and (ii) adistance q between respective ends (outer edges) of each alignmentmarker 84 and its corresponding alignment marker 221 along the y axisdirection. The computing section 102 thus determines the amount ofpositional difference in alignment to compute a correction value for asubstrate position.

In the case where, for example, the substrate scanning direction is thex axis direction, the sign “r” in (a) through (c) of FIG. 5 indicates adistance between the respective ends along the substrate scanningdirection, whereas the sign “q” in (a) through (c) of FIG. 5 indicates adistance between the respective ends along the direction perpendicularto the substrate scanning direction. The computing section 102 measures(determines) the distances r and q at, for example, opposite ends of thevapor deposition region 210 of the film formation substrate 200 todetermine the amount of shift caused in alignment during a substratescan.

The present embodiment describes an example case that involvessimultaneously scanning the film formation substrate 200 and carryingout an alignment between the shadow mask 81 and the film formationsubstrate 200 as described below. The present embodiment is, however,not limited to such an arrangement. The present embodiment canalternatively be arranged such that a sufficient alignment is carriedout before a substrate scan and that no alignment is carried out duringa substrate scan.

The present embodiment can be arranged as in an embodiment describedbelow such that, for example, the film formation substrate 200 is movedalong a first side of the vapor deposition region 210 of the filmformation substrate 200 (for example, along the y axis direction in (a)through (c) of FIG. 5), and is then moved along a second side (forexample, the x axis direction in (a) through (c) of FIG. 5) orthogonalto the first side. In this case, the sign “r” in (a) through (c) of FIG.5 indicates a distance between the respective ends along the directionperpendicular to the substrate scanning direction, whereas the sign “q”in (a) through (c) of FIG. 5 indicates a distance between the respectiveends along the direction (shift direction) in which the film formationsubstrate 200 is moved.

In this case, the computing section 102 measures distances r and q foralignment markers located at the four corners, and thus determines (i)the amount of positional difference present in alignment at the start ofa substrate scan and (ii) the amount of positional difference present inalignment after the film formation substrate 200 is moved (shifted).

The alignment markers 84 and 221 may each be, as illustrated in (a)through (c) of FIG. 5, in the shape of, for example, (i) a belt, (ii) arectangle such as a square, (iii) a frame, or (iv) a cross. Thealignment markers 84 and 221 are thus not particularly limited in termsof shape.

In the case where a sufficient alignment is carried out before asubstrate scan and no alignment is carried out during a substrate scanas described above, the alignment markers 221 do not need to be providedalong a side of the vapor deposition region 210 of the film formationsubstrate 200, and may instead be provided at, for example, the fourcorners of the film formation substrate 200.

The following describes in detail a method for forming a pattern of anorganic EL layer by using, as a device for producing the organic ELdisplay device 1, the above vapor deposition device 50 of the presentembodiment.

The description below deals with an example case that, as describedabove, involves (i) using, as the film formation substrate 200, a TFTsubstrate 10 obtained after the hole injection layer/hole transfer layervapor deposition step (S2) is finished and (ii) carrying out, as apattern formation of an organic EL layer, a selective applicationformation of luminescent layers 23R, 23G, and 23B during the luminescentlayer vapor deposition step (S3).

The present embodiment assumed (i) 100 mm for the gap g2 between thevapor deposition source 85 and the shadow mask 81 (that is, the distancebetween a surface of the vapor deposition source 85 in which surface theinjection holes 86 are provided and the shadow mask 81) and (ii) 200 μmfor the distance between the TFT substrate 10 serving as the filmformation substrate 200 and the shadow mask 81.

The present embodiment further assumed (i) for a substrate size of theTFT substrate 10, 320 mm along the scanning direction and 400 mm alongthe direction perpendicular to the scanning direction and (ii) forwidths of the vapor deposition region (display region), 260 mm for thewidth along the scanning direction (that is, the width d4) and 310 mmfor the width (that is, the width d3) along the direction perpendicularto the scanning direction.

The present embodiment assumed 360 μm (along the scanning direction)×90μm (along the direction perpendicular to the scanning direction) forwidths of the openings 15R, 15G, and 15B for the respective sub-pixels2R, 2G, and 2B of the TFT substrate 10. The present embodiment furtherassumed 480 μm (along the scanning direction)×160 μm (along thedirection perpendicular to the scanning direction) for a pitch betweenthe openings 15R, 15G, and 15B. The pitch between the openings 15R, 15G,and 15B (that is, a pitch between pixel openings) refers to a pitchbetween respective openings 15R, 15G, and 15B for the sub-pixels 2R, 2G,and 2B adjacent to one another, but not to a pitch between sub-pixels ofan identical color.

The present embodiment used, as the shadow mask 81, a shadow mask having(i) a length of 600 mm along the width d1 (that is, the width along thedirection perpendicular to the scanning direction) along each long side81 a (corresponding to the long-axis direction) and (ii) a length of 200mm along the width d2 (that is, the width along the scanning direction)along each short side 81 b (corresponding to the short-axis direction).The shadow mask 81 had openings 82 (i) each having opening widths of 150mm (along the width d5 in the long-axis direction; see FIG. 1)×130 μm(along the width d6 in the short-axis direction; see FIG. 1), (ii)having, along an interval d8 (see FIG. 1) between adjacent openings 82and 82, a length of 350 μm, and (iii) having, along a pitch p (seeFIG. 1) between respective centers of adjacent openings 82 and 82, alength of 480 μm.

In the present embodiment, the shadow mask 81 preferably has a length ofnot less than 200 mm for the width d2 (that is, a short side length)along each short side 81 b. This is due to the reason below.

The vapor deposition rate is preferably not higher than 10 nm/s. If thevapor deposition rate exceeds 10 nm/s, a deposited film (that is, avapor-deposited film) will have a decreased uniformity, thus resultingin a decreased organic EL property.

A vapor-deposited film typically has a film thickness of not larger than100 nm. A film thickness of larger than 100 nm will require applicationof a high voltage, and consequently increase power consumption of aproduced organic EL display device. The above vapor deposition rate andthe film thickness of a vapor-deposited film allow estimation of anecessary vapor deposition period of 10 seconds.

Due to a limit in processing capability (tact time), a scan rate of 13.3mm/s or higher is at least necessary in order to, for example, completevapor deposition with respect to a 2 m-wide glass substrate in 150seconds. The processing time of 150 seconds is a tact time that allowsprocessing of about 570 glass substrates per day.

Securing the above vapor deposition period of 10 seconds at the abovescan rate requires the shadow mask 81 to have openings 82 each having awidth of at least 133 mm along the scanning direction.

Assuming that approximately 30 mm is appropriate for the distance(margin width d7; see FIG. 1) from each end of an opening 82 to acorresponding end of the shadow mask 81, the shadow mask 81 requires alength of 133+30+30≈200 mm for the width along the scanning direction.

The shadow mask 81 thus preferably has a short side length (that is, thewidth d2) of not less than 200 mm. The short side length is, however,not limited to not less than 200 mm if there is a change in the vapordeposition rate, the film thickness of a vapor-deposited film, and/orthe allowable amount of the tact time.

The present embodiment assumes 30 mm/s for the rate of scanning the TFTsubstrate 10.

FIG. 10 is a flowchart illustrating an example method for forming apredetermined pattern on the TFT substrate 10 with use of the vapordeposition device 50 of the present embodiment.

The following specifically describes, with reference to the flowillustrated in FIG. 10, a method of FIG. 8 for forming luminescentlayers 23R, 23G, and 23B with use of the vapor deposition device 50.

The method first, as illustrated in FIG. 3, places (fixes) the shadowmask 81 above the vapor deposition source 85 in the vacuum chamber 60with use of the mask holding member 87 via the mask tension mechanism88, and horizontally holds the shadow mask 81 under tension by the masktension mechanism 88 so that no bending or elongation due to the selfweight is caused to the shadow mask 81. During this step, the methodsimultaneously (i) maintains the distance between the vapor depositionsource 85 and the shadow mask 81 with use of the mask holding member 87and (ii) carries out an alignment with use of the alignment markers 84of the shadow mask 81 in such a manner that the substrate scanningdirection is identical to the long-axis direction of the stripe-shapedopenings 82 provided in the shadow mask 81. The above step assembles themask unit 80 (preparation of a mask unit).

The method next inserts the TFT substrate 10 in the vacuum chamber 60and, as indicated in FIG. 10, carries out a rough alignment with use ofthe alignment markers 221 of the TFT substrate 10 as the film formationsubstrate 200 so that each sub-pixel column of an identical color of theTFT substrate 10 has a direction that is identical to the substratescanning direction (S11). The method holds the TFT substrate 10 with useof the substrate holding member 71 so that no bending due to the selfweight is caused to the TFT substrate 10.

The method then adjusts the gap g1 (substrate-mask gap) between the TFTsubstrate 10 and the shadow mask 81 so that the gap is uniform, andplaces the TFT substrate 10 and the shadow mask 81 so that they faceeach other. This allows the TFT substrate 10 and the shadow mask 81 tobe aligned with each other (S13). The present embodiment adjusted thegap g1 between the TFT substrate 10 and the shadow mask 81 toapproximately 200 μm throughout the entire TFT substrate 10.

The method next carried out vapor deposition of materials for the redluminescent layer 23R with respect to the TFT substrate 10 whilescanning the TFT substrate 10 at 30 mm/s.

The above step carried out a substrate scan in such a manner that theTFT substrate 10 passed through a position above the shadow mask 81. Theabove step simultaneously carried out the scan and a precise alignmentwith use of the alignment markers 84 and 221 so that the openings 82 ofthe shadow mask 81 coincide with red sub-pixel 2R columns (S14).

The luminescent layer 23R was made of (i)3-phenyl-4(1′-naphthyl)-5-phenyl-1,2,4-triazole (TAZ) (host material)and (ii) bis(2-(2′-benzo[4,5-α]thienyl)pyridinato-N,C3′)iridium(acetylacetonate) (btp2Ir(acac)) (red-light emitting dopant). Thesematerials (red organic materials) were codeposited at respective vapordeposition rates of 5.0 nm/s and 0.53 nm/s to form the luminescent layer23R.

Vapor deposition particles of the red organic materials which particlesare emitted from the vapor deposition source 85 are deposited, throughthe openings 82 of the shadow mask 81 and onto positions facing therespective openings 82 of the shadow mask 81, when the TFT substrate 10passes through a position directly above the shadow mask 81. In thepresent embodiment, the TFT substrate 10 having passed through theposition directly above the shadow mask 81 had the red organic materialsdeposited thereon at a film thickness of 25 nm.

This causes a vapor-deposited film having a striped shape to be formedon the TFT substrate 10 throughout a region from one end to the otherend in a direction in which the TFT substrate 10 is moved (see FIG. 17).

The following describes, with reference to FIG. 11, a method foradjusting an alignment in S14 above.

FIG. 11 is a flowchart illustrating the alignment adjustment method. Thealignment is adjusted as illustrated in the flow of FIG. 11.

The method first captures a substrate position of the TFT substrate 10as the film formation substrate 200 with use of the image sensors 90(S21).

Next, the image detecting section 101, on the basis of the imagecaptured by the image sensors 90, detects respective images of (i) thealignment markers 221 of the TFT substrate 10 and of (ii) the alignmentmarkers 221 of the shadow mask 81 (S22).

Then, the computing section 102 calculates, from the respective imagesof the alignment markers 221 and 84, the images having been detected bythe image detecting section 101, the amount of positional differencebetween the alignment markers 221 and the alignment markers 84 todetermine a correction value for a substrate position by computation(S23).

Next, the motor drive control section 103 drives the motor 72 on thebasis of the correction value to correct the substrate position (S24).

Then, the image sensors 90 detect the substrate position as corrected,after which the steps S21 through S25 are repeated.

As described above, the present embodiment causes the image sensors 90to repeatedly detect a substrate position to correct it. This makes itpossible to simultaneously carry out a substrate scan and correct asubstrate position, and consequently to form a film while carrying out aprecise alignment between the TFT substrate 10 and the shadow mask 81.

The film thickness of the luminescent layer 23R can be adjusted on thebasis of (i) a reciprocating scan (that is, reciprocating movement ofthe TFT substrate 10) and (ii) a scan rate. The present embodiment,after the scan in S14, (i) reversed the direction of scanning the TFTsubstrate 10, and (ii) further deposited the red organic materials bythe same method as in S14 at the positions at which the red organicmaterials were deposited in S14. This formed a luminescent layer 23Rhaving a film thickness of 50 nm.

The present embodiment, after the step S14, retrieved from the vacuumchamber 60 the TFT substrate 10 on which the luminescent layer 23R wasformed (S15), and then formed a green luminescent layer 23G, with use of(i) a mask unit 80 for forming the green luminescent layer 23G and (ii)a vacuum chamber 60, in a manner similar to the above process of formingthe luminescent layer 23R.

The present embodiment, after thus forming the luminescent layer 23G,formed a blue luminescent layer 23B, with use of (i) a mask unit 80 forforming the blue luminescent layer 23B and (ii) a vacuum chamber 60, ina manner similar to the respective processes of forming the luminescentlayers 23R and 23G.

Specifically, the present embodiment, for each of the processes offorming the luminescent layers 23G and 23B, prepared a shadow mask 81having openings 82 at positions for a corresponding one of theluminescent layers 23G and 23B. The present embodiment placed eachshadow mask 81 in a vacuum chamber 60 for forming a corresponding one ofthe luminescent layers 23G and 23B, and thus scanned the TFT substrate10 for vapor deposition while carrying out an alignment so that theopenings 82 of the shadow mask 81 coincide with a corresponding one of(i) sub-pixel 2G columns and (ii) sub-pixel 2B columns.

The luminescent layer 23G was made of (TAZ) (host material) and Ir(ppy)3 (green-light emitting dopant). These materials (green organicmaterials) were codeposited at respective vapor deposition rates of 5.0nm/s and 0.67 nm/s to form the luminescent layer 23G.

The luminescent layer 23B was made of TAZ (host material) and2-(4′-t-butyl phenyl)-5-(4″-biphenylyl)-1,3,4-oxadiazole (t-Bu PBD)(blue-light emitting dopant). These materials (blue organic materials)were codeposited at respective vapor deposition rates of 5.0 nm/s and0.67 nm/s to form the luminescent layer 23B.

The luminescent layers 23G and 23B each had a film thickness of 50 nm.

The above steps prepared a TFT substrate 10 on which were formedrespective patterns of the luminescent layers 23R, 23G, and 23B havingrespective colors of red (R), green (G), and blue (B).

By the way, in a case where vapor deposition layers (in the presentembodiment, the luminescent layers 23R, 23G, and 23B of the organic ELelements 20) are formed by relative movement between the shadow mask 81and the TFT substrate 10, the following problems can arise. FIG. 13 is aview schematically illustrating how the TFT substrate 10 is configuredbefore formation of the luminescent layers 23R, 23G, and 23B.

As illustrated in FIG. 7, the TFT substrate 10 has the plurality ofpixels that are arranged two-dimensionally (in the present embodiment,arranged in a matrix). In the following description, a region in whichthe plurality of pixels are arranged will be referred to as a pixelregion A_(G).

As mentioned above, the wires 14 run in a mesh-like manner in directionsin which the plurality of pixels in the pixel region A_(G) are aligned,and the wires 14 are drawn out of the pixel region A_(G) so as to beelectrically connected to an external circuit. The external circuit is,for example, a flexible film cable FC or an IC (Integrated circuit).

Terminals of the wires 14 that are drawn out of the pixel region A_(G)are gathered in a plurality of regions outside the pixel region A_(G)(see FIG. 13). Such regions in which the terminals of the wires 14 aregathered will be hereinafter referred to as terminal section regions.

Specifically, a plurality of terminal section regions A1 through A4 areprovided at an outer side of and adjacently to respective sides L1through L4 (at an outer side of and along the respective sides L1through L4) of a rectangle which the matrix forms so as to surround thepixel region A_(G).

It is assumed here that (i) a terminal section region located on theleft hand of the pixel region A_(G) is the terminal section region A1,(ii) a terminal section region located on the right hand of the pixelregion A_(G) is the terminal section region A2, (iii) a terminal sectionregion located on the upper hand of the pixel region A_(G) is theterminal section region A3, and (iv) a terminal section region locatedon the lower hand of the pixel region A_(G) is the terminal sectionregion A4, as illustrated in FIG. 13.

Each of the terminals of the wires 14 (except for terminals connected tothe second electrode 26) is located in a terminal section regionadjacent to a side closest to the terminal out of the four sides L1through L4 of the rectangle.

Assuming that the TFT substrate 10 is moved in the left-right directionof FIG. 13, the terminal section regions A1 and A2, which are close tothe sides L1 and L2 that are vertical to the direction in which the TFTsubstrate 10 is moved, are referred to as vertical-side terminal sectionregions A1 and A2, whereas the terminal section regions A3 and A4, whichare close to the sides that are parallel to the direction in which theTFT substrate 10 is moved, are referred to as parallel-side terminalsection regions A3 and A4.

Meanwhile, connection sections to be connected to the second electrode26 are provided in regions different from the terminal section regionsA1 through A4. In the present embodiment, such connection sections to beconnected to the second electrode 26 are provided at an outer side ofand adjacently to the respective upper and lower sides of the rectangle.Regions where such connection sections to be connected to the secondelectrode 26 are provided will be hereinafter referred to as secondelectrode connection sections. As illustrated in FIG. 13, an uppersecond electrode connection section will be hereinafter referred to as asecond electrode connection section A5, whereas a lower second electrodeconnection section will be hereinafter referred to as a second electrodeconnection section A6.

In FIG. 13, the pixel region A_(G) and the second electrode connectionsections A5 and A6 are sealed by the sealing substrate 40, whereas theterminal section regions A1 through A4 are exposed to the outsidewithout being sealed.

FIG. 14 is a view illustrating a state where the TFT substrate 10 sealedby the sealing substrate 40 is about to be connected to the flexiblefilm cable FC which is one example of the external circuit. FIG. 15 is aview illustrating a configuration around the terminals of the wires 14located in the vertical-side terminal section region A1.

Each of the terminals of the wires 14 whose terminals are gathered inthe vertical-side terminal section region A1 is connected, in aconnection region 202, to a connection terminal FC_(T) of the flexiblefilm cable FC via an anisotropically-conductive adhesive film (ACF) orthe like, for example, as illustrated in FIG. 15. The same is true forthe terminals of the wires 14 whose terminals are gathered in thevertical-side terminal section region A2 and for the terminals of thewires 14 whose terminals are gathered in the parallel-side terminalsection regions A3 and A4.

It is assumed here that, through relative movement between the shadowmask 81 and the TFT substrate 10, an organic film (e.g., the luminescentlayer 23R) is vapor-deposited on the TFT substrate 10, which has thevertical-side terminal section regions A1 through A4 exposed to anoutside, throughout a region from one end to the other end in adirection of the movement.

A vapor deposition region can be caused to substantially coincide withthe pixel region A_(G) by appropriately setting a range of the openings82 in a direction vertical to the direction of the movement. This makesit possible to prevent the organic film from being vapor-deposited onthe parallel-side terminal section regions A3 and A4.

Meanwhile, the organic film is vapor-deposited on the vertical-sideterminal section regions A1 and A2, so that the connection regions 202of the terminals located in the vertical-side terminal section regionsA1 and A2 are covered with the organic film as illustrated in FIG. 15.

In a case where the organic film has high electrical resistance, therearises a problem that good electrical connection between (i) the wires14 having respective terminals in the vertical-side terminal sectionregions A1 and A2 and (ii) the connection terminal FC_(T) of theflexible film cable FC cannot be established. Failure to establish goodelectrical connection with the connection terminal FC_(T) of theflexible film cable FC results in that the flexible film cable FC peelsoff from the TFT substrate 10 or in that the organic EL display device 1has a display failure.

Meanwhile, in a case where the organic film has low electricalresistance, there arises a problem that an electrical leakage occurs viathe organic film.

It is therefore necessary to take measures for preventing the organicfilm from being vapor-deposited and formed on the terminals located inthe vertical-side terminal section regions A1 and A2. Such regions wherethe organic film should not be vapor-deposited will be hereinafterreferred to as vapor deposition unnecessary regions.

One of the measures is to prevent vapor deposition on the vapordeposition unnecessary regions by blocking vapor deposition of theorganic film with the use of a shutter 89, specifically, to close theshutter 89 when the vapor deposition unnecessary regions reach theopenings 82 of the shadow mask 81.

However, this causes a difference among parts of the TFT substrate 10 interms of period of time for which the parts face the openings 82 sinceeach of the openings 82 has a length in the direction of the movement.This may leave a region, above the openings 82 of the shadow mask 81, inwhich the organic film should be vapor-deposited but has not beenvapor-deposited when the shutter 89 is closed. Closing the shutter insuch a state causes shortage of a vapor deposition amount in the regionin which the organic film should be vapor-deposited. This leads to aproblem that an appropriate thickness of the vapor-deposited film cannotbe secured in the region.

Another one of the measures is to wipe away the organic film with theuse of an organic solvent in a later step. However, this causes problemssuch as occurrence of a residue of the organic solvent and introductionof dust.

In view of the above problems, the TFT substrate 10 of the presentembodiment is arranged such that the terminals (except the terminalsconnected to the second electrode 26) of the wires 14 are gathered notto be located in regions (hereinafter referred to as “vapor depositionregions”) on which the vapor-deposited film is to be vapor-deposited.

FIG. 16 is a view illustrating how the plurality of wires 14 aredisposed on the TFT substrate 10. FIG. 17 is a view illustrating a statewhere a plurality of TFT substrates 10 of the present embodiment arearranged in a matrix and vapor deposition is simultaneously carried outon the plurality of TFT substrates 10.

Specifically, as illustrated in FIGS. 16 and 17, the terminals of thewires 14, which have been gathered in the vertical-side terminal sectionregions A1 and A2 in the conventional technique, are gathered in theparallel-side terminal section regions P_(T1) and P_(T2) each of whichis provided at an outer side of and adjacently to a side extending inparallel with a moving direction in which the TFT substrate 10 is movedrelative to the shadow mask 81. In other words, as illustrated in FIG.16, the wires 14 are designed so that terminals of some wires 14, whichare other than the wires 14 connected to the second electrode 26, aregathered in the parallel-side terminal section regions P_(T1) andP_(T2).

According to the wiring arrangement illustrated in FIG. 16, terminals ofwires 14, which extend in a left-right direction, are gathered in theparallel-side terminal section region P_(T2) located on the lower side,and terminals of wires 14, which extend in an up-and-down direction, aregathered in the parallel-side terminal section region P_(T1) located onthe upper side.

Note that the present embodiment employs an arrangement in which (i)second electrode connection section P_(T3) is provided between theparallel-side terminal section region P_(T1) and the side of therectangle in the vicinity of the parallel-side terminal section regionP_(T1) and (ii) the second electrode connection section P_(T4) isprovided between the parallel-side terminal section region P_(T2) andthe side of the rectangle in the vicinity of the parallel-side terminalsection region P_(T2). Note, however, that the second electrodeconnection sections P_(T3) and P_(T4) are not limited to theselocations.

With the arrangement, it is possible to prevent the organic film frombeing vapor-deposited on the terminals of the wires 14 gathered in thevertical-side terminal section regions A1 and A2. As a result,electrical connection can be well established between the terminals ofthe gate lines 14G and the connection terminal FC_(T) of the flexiblefilm cable FC.

Further, the arrangement eliminates the need for the conventionalmeasure of wiping away the organic film formed in the vertical-sideterminal section regions A1 and A2 with the use of an organic solvent ina later step. This allows a reduction in time and cost for production.

Moreover, it is possible to prevent the problems, which conventionallyoccur due to wiping of the vapor-deposited film with the use of anorganic solvent, such as (i) occurrence of a residue due to insufficientwiping and (ii) occurrence of a foreign substance which causesconnection failure with an external circuit and ultimately causes areduction in yield of an organic EL display device. In addition, it ispossible to prevent the organic solvent from damaging the sealingsubstrate 40 and the like, thereby preventing a reduction in reliabilityof the organic EL display device 1.

Moreover, there is no need for addition of any step and device since itis only necessary to change design of the wires on the TFT substrate 10.

Second Embodiment

The following description will discuss a film formation substrate inaccordance with a second embodiment of the present invention. Note thatthe present embodiment mainly describes differences from the firstembodiment. The same reference numerals are given to constituent memberswhich have functions identical with those of the constituent membersemployed in the first embodiment, and explanations of such constituentmembers are omitted. FIG. 18 is a view schematically illustrating aconfiguration of a TFT substrate (film formation substrate) inaccordance with the second embodiment.

A TFT substrate of the present embodiment is different from that of thefirst embodiment in locations in which second electrode connectionsections P_(T3) and P_(T4) are provided.

Specifically, in the first embodiment, (i) the second electrodeconnection section P_(T3) is provided between a side, which is inparallel with a move direction in which the TFT substrate 10 is movedrelative to the shadow mask 81, and the parallel-side terminal sectionregion P_(T1), and (ii) the second electrode connection section P_(T4)is provided between another side, which is in parallel with the movingdirection, and the parallel-side terminal section region P_(T2). On theother hand, in the present embodiment, second electrode connectionsections P_(T3)′ and P_(T4)′ are arranged in respective regions each ofwhich is located at an outer side of and adjacently to a correspondingside intersecting with the move direction (see FIG. 18).

In this case, the second electrode connection sections P_(T3)′ andP_(T4)′ are to be covered with an organic film. However, the organicfilm is a stripe-shaped pattern film, and therefore no organic filmexists between the stripes. With the configuration, it is possible toconnect wires 14 directly to a second electrode 26 by causing a terminalof each of the wires 14, which terminal is to be connected to the secondelectrode 26, to be exposed through a corresponding region between thestripes of the organic film.

Here, unlike the parallel-side terminal section regions P_(T1) andP_(T2), the second electrode connection sections P_(T3)′ and P_(T4)′ donot require accuracy in locations in which the wires are connected withthe second electrode. Moreover, the second electrode connection sectionsP_(T3)′ and P_(T4)′ can have a larger contact area by enlarging aconnection region 202 in which the wires 14 are connected with thesecond electrode. That is, the second electrode connection sectionsP_(T3)′ and P_(T4)′ have design freedom higher than that of the terminalsection regions P_(T1) and P_(T2). Therefore, the second electrodeconnection sections P_(T3)′ and P_(T4)′ hardly cause defectiveelectrical connection even in a case where electrical connections areprovided between stripes of the stripe-shaped organic film.

Even in a case where the organic film is an electrically conductivefilm, electrical leakage would not be caused because each of the secondelectrode connection sections P_(T3)′ and P_(T4)′ is a single terminal(i.e., a single element), unlike the case where terminals, which areconnected to the organic film for corresponding wires, are gathered inthe terminal section regions P_(T1) and P_(T2).

As such, the present embodiment can bring about an effect similar tothat of the first embodiment. In addition to this, it is possible toshorten a length of the organic EL display device 1 in a directionintersecting with the moving direction, in which the TFT substrate 10 ismoved relative to the shadow mask 81, by forming only the parallel-sideterminal section regions P_(T1) and P_(T2) along the sides extending inparallel with the moving direction.

The present invention is not limited to the embodiments, but can bealtered by a skilled person in the art within the scope of the claims.An embodiment derived from a proper combination of technical meansdisclosed in respective different embodiments is also encompassed in thetechnical scope of the present invention.

For example, in order to differentiate total thicknesses of organicfilms for respective colors, it is possible to selectively provideorganic layers (e.g., hole transfer layers), other than the luminescentlayer, for respective pixels by carrying out a vapor depositionformation with the use of the shadow mask, as with the foregoing method.In this case, the film formation substrate of the present invention isexemplified by a TFT substrate 10 which is in a state immediately beforea hole transfer layer is formed on the TFT substrate 10.

The vapor deposition device 50 may include, instead of the substratemoving mechanism 70, (i) a substrate holding member 71 (for example, anelectrostatic chuck) for fixing the film formation substrate 200 and(ii) a mask unit moving mechanism for moving the mask unit 80 relativeto the film formation substrate 200 while maintaining the respectivepositions of the shadow mask 81 and the vapor deposition source 85relative to each other. The vapor deposition device may alternativelyinclude both the substrate moving mechanism 70 and a mask unit movingmechanism.

In other words, the film formation substrate 200 and the mask unit 80simply need to be so provided that at least one of them is moveablerelative to the other. The advantages of the present invention can beachieved regardless of which of the film formation substrate 200 and themask unit 80 is arranged to move.

In the case where the film formation substrate 200 is moved relative tothe mask unit 80 as described above, the shadow mask 81 and the vapordeposition source 85 simply need to be fixed in position relative toeach other, but do not necessarily need to be integrated with eachother.

The mask unit 80 may be arranged, for example, such that (i) the vapordeposition source 85 is fixed to, for example, a bottom wall among innerwalls of the vacuum chamber 60, (ii) the mask holding member 87 is fixedto one of the inner walls of the vacuum chamber 60, and consequently(iii) the shadow mask 81 and the vapor deposition source 85 are fixed inposition relative to each other.

The present embodiment describes an example case in which the openings82 of the shadow mask 81 are aligned with the injection holes 86 of thevapor deposition source 85 so that the injection holes 86 are eachpositioned inside one of the openings 82 in a plan view and that theopenings 82 are provided in a one-to-one correspondence with theinjection holes 86. The present embodiment is, however, not limited tosuch an arrangement. The openings 82 do not necessarily need to beprovided (i) to face the injection holes 86 or (ii) in a one-to-onecorrespondence with the injection holes 86.

The present embodiment describes an example case in which both theopenings 82 of the shadow mask 81 and the injection holes 86 of thevapor deposition source 85 are arranged one-dimensionally. The presentembodiment is, however, not limited to such an arrangement. The openings82 of the shadow mask 81 and the injection holes 86 of the vapordeposition source 85 simply need to be provided to face each other, andmay thus be arranged two-dimensionally.

The present embodiment describes an example case involving a pluralityof openings 82 in the shadow mask 81 and a plurality of injection holes86 in the vapor deposition source 85. The present embodiment is,however, not limited to such an arrangement. The shadow mask 81 simplyneeds to include at least one opening 82, whereas the vapor depositionsource 85 simply needs to include at least one injection hole 86.

In other words, the present embodiment may alternatively be arrangedsuch that the shadow mask 81 includes only one opening 82 and that thevapor deposition source 85 includes only one injection hole 86. Eventhis arrangement makes it possible to form a predetermined pattern onthe film formation substrate 200 by (i) moving at least one of the maskunit 80 and the film formation substrate 200 relative to the other and(ii) sequentially depositing vapor deposition particles onto the vapordeposition region 210 of the film formation substrate 200 through theopening 82 of the shadow mask 81.

The present embodiment describes an example case in which the shadowmask 81 includes slit-shaped openings 82. The shape of the openings 82can, however, be simply set as appropriate to form a desired vapordeposition pattern, and is thus not particularly limited to any specificone.

The present embodiment describes an example method for producing, asdescribed above, an organic EL display device 1 of the bottom emissiontype, which extracts light from the TFT substrate 10 side. The presentembodiment is, however, not limited to such production. The presentinvention is also suitably applicable to an organic EL display device 1of a top emission type, which extracts light from the sealing substrate40 side.

The present embodiment describes an example case that uses a glasssubstrate as a supporting substrate for each of the TFT substrate 10 andthe sealing substrate 40. The present embodiment is, however, notlimited to such an arrangement.

The respective supporting substrates for the TFT substrate 10 and thesealing substrate 40 may, for example, each be, other than a glasssubstrate, a transparent substrate such as a plastic substrate in thecase where the organic EL display device 1 is an organic EL displaydevice of the bottom emission type. In the case where the organic ELdisplay device 1 is an organic EL display device of the top emissiontype, the respective supporting substrates may, for example, each be anopaque substrate such as a ceramics substrate other than the abovetransparent substrate.

The present embodiment describes an example case involving an anode (inthe present embodiment, the first electrode 21) formed in a matrix. Theanode is, however, not particularly limited in terms of shape, material,or size as long as it has the function as an electrode for supplyingpositive holes to an organic EL layer. The anode may have, for example,a stripe shape. By the nature of an organic EL element, at least one ofthe anode and the cathode is preferably transparent. An organic ELelement typically includes a transparent anode.

The present embodiment describes an example method for producing anactive matrix organic EL display device which has a TFT in each pixel.The present embodiment is, however, not limited to such production. Thepresent invention is also suitably applicable to a passive matrixorganic EL display device 1 which has no TFT in each pixel.

In the present embodiment, the scan rate, the vapor deposition rate, andthe like can be set as appropriate.

The gap g1 between the TFT substrate 10 serving as the film formationsubstrate 200 and the shadow mask 81 and the gap g2 between the vapordeposition source 85 and the shadow mask 81 can be set as appropriate.

The gap g1 between the TFT substrate 10 and the shadow mask 81 may beadjusted as appropriate as long as (i) the gap is fixed and (ii) the TFTsubstrate 10 and the shadow mask 81 do not come into contact with eachother. The gap g2 may be adjusted as appropriate in consideration of (i)distribution of, for example, spatial spread of vapor depositionparticles and (ii) influence of heat radiated from the vapor depositionsource 85.

A region in which the terminals of the wires 14 are gathered is notlimited to the parallel-side terminal section regions P_(T1) and P_(T2).For example, as indicated by a region x in FIG. 17, a region in whichthe terminals of the wires 14 are gathered can be provided on a diagonalline of the rectangle, which is formed by the matrix, so that the regionis adjacent to the rectangle. That is, the region in which the terminalsof the wires 14 are gathered is not limited in particular, provided thatthe region is outside the vapor deposition region 210.

In the above embodiments, the parallel-side terminal section regionsP_(T1) and P_(T2) are provided. Note, however, that the terminals of thewires 14 may be gathered in any one of the parallel-side terminalsection regions P_(T1) and P_(T2). According to the first embodiment,the second electrode connection sections P_(T3) and P_(T4) are provided,and, according to the second embodiment, the second electrode connectionsections P_(T3)′ and P_(T4)′ are provided. Note, however, that theterminals of the wires 14 may be gathered in any one of the secondelectrode connection sections P_(T3) and P_(T4) or in any one of thesecond electrode connection sections P_(T3)′ and P_(T4)′.

The present invention is applicable not only to production of theorganic EL display device 1, but also to production of other deviceswhich face a problem of formation of a vapor-deposited film on aterminal section region in a case where vapor deposition is carried outby relative movement of a substrate and a shadow mask.

[Overview]

As above described, according to the film formation substrate of anembodiment of the present invention, the pixel region is a rectangularregion in which the plurality of pixels are arranged in a matrix; atleast one of four sides of a rectangle formed by the pixel regionextends in parallel with the moving direction; and the terminals of theplurality of wires are gathered (i) in a region outside the vapordeposition layer formation region and (ii) at an outer side of the atleast one of four sides so as to be arranged along the at least one offour sides.

According to the configuration, the terminals of the plurality of wiresare gathered (i) in the region outside the vapor deposition layerformation region and (ii) at an outer side of the at least one of foursides so as to be arranged along the at least one of four sides. Thismakes it possible to shorten a length of the plurality of wires as muchas possible, as compared with a case where the location in which theterminals are gathered is set to another location.

According to the film formation substrate of an embodiment of thepresent invention, a connection section of a second electrode forinjecting electrons into a luminescent layer, which is formed on thefilm formation substrate, is provided (i) in a region outside the vapordeposition layer formation region and (ii) at an outer side of the atleast one of four sides so as to extend along the at least one of foursides.

According to the film formation substrate of an embodiment of thepresent invention, a connection section of a second electrode forinjecting electrons into a luminescent layer, which is formed on thefilm formation substrate, is provided in the vapor deposition layerformation region.

According to the configuration, the connection section of the secondelectrode is gathered in the vapor deposition layer formation region.This allows terminals, which are of wires other than those connectedwith the second electrode, to be gathered in a space in which,conventionally, connection sections of wires to be connected to thesecond electrode have been provided.

Note that, in this case, the connection section of the second electrodeis not directly connected to an external circuit but is connected to theexternal circuit via the terminals that are formed outside the vapordeposition layer formation region.

According to the film formation substrate of an embodiment of thepresent invention, the pixel region is a rectangular region in which theplurality of pixels are arranged in a matrix; at least one of four sidesof a rectangle formed by the pixel region extends in parallel with themoving direction; and the connection section of the second electrode isprovided (i) at an outer side of another side of the rectangle, whichanother side extends in a direction that intersects with the at leastone of four sides extending in parallel with the moving direction, and(ii) so as to extend along the another side.

According to the embodiment of the present invention, the connectionsection of the second electrode is provided (i) at an outer side ofanother side of the rectangle, which another side extends in a directionthat intersects with the at least one of four sides extending inparallel with the moving direction, and (ii) so as to extend along theanother side. This makes it possible to shorten a length of wires, whichare connected to the connection section of the second electrode, as muchas possible.

The organic EL display device of an embodiment of the present inventionincludes: the film formation substrate which has any of the abovedescribed configurations and on which the vapor deposition layer hasbeen vapor-deposited, the vapor deposition layer including an organic ELlayer made of an organic EL element that emits light in response to anapplied electric current.

According to the configuration, it is possible to provide the organic ELdisplay device that can achieve the effect of any of the foregoingconfigurations of the present invention.

INDUSTRIAL APPLICABILITY

The film formation substrate of the present invention is suitablyapplicable to, for example, a device and method for producing an organicEL display device which are used in a process of, for example, selectiveapplication formation of an organic layer for an organic EL displaydevice.

REFERENCE SIGNS LIST

-   1: Organic EL display device-   2: Pixel-   10: TFT substrate (film formation substrate)-   26: Second electrode-   50: Vapor deposition device-   81: Shadow mask (vapor deposition mask)-   82: Opening-   85: Vapor deposition source-   86: Injection hole-   200: Film formation substrate-   210: Vapor deposition region-   211: Vapor-deposited film (vapor deposition layer)-   14: Wire-   A_(G): Pixel region

The invention claimed is:
 1. A film formation substrate on which vapordeposition layers are formed by use of a vapor deposition device whichincludes (i) a vapor deposition source having an injection hole fromwhich vapor deposition particles are injected and (ii) a vapordeposition mask facing the vapor deposition source and having an openingthrough which the vapor deposition particles injected from the injectionhole are deposited so as to form the vapor deposition layers, said filmformation substrate comprising: a plurality of pixels two-dimensionallyarranged in a pixel region; and a plurality of wires electricallyconnected to the respective plurality of pixels, the plurality of wiresrunning in a mesh-like manner in directions in which the plurality ofpixels in the pixel region are aligned and being drawn out of the pixelregion, each of the plurality of pixels including a plurality ofsub-pixels, the vapor deposition layers being formed in a vapordeposition layer formation region, by injecting the vapor depositionparticles from the injection hole while moving said film formationsubstrate relative to the vapor deposition mask in a moving direction sothat the pixel region passes a region facing the opening, the vapordeposition layer formation region including the pixel region, the filmformation substrate including, in this order, (i) the plurality ofwires, (ii) a first electrode having a two-dimensional patterncorresponding to each of the sub-pixels, (iii) the vapor depositionlayers including a luminescent layer, and (iv) a second electrode formedunintermittently over the sub-pixels having different colors and locatedadjacent to one another, one of the first electrode and the secondelectrode being for injecting electrons to the luminescent layer, firstterminals of the plurality of wires other than wires connected with thesecond electrode being disposed outside the vapor deposition layerformation region, and second terminals of the plurality of wiresconnected with the second electrode being disposed inside the vapordeposition layer formation region.
 2. The film formation substrate asset forth in claim 1, wherein: the pixel region is a rectangular regionin which the plurality of pixels are arranged in a matrix; at least oneof four sides of a rectangle formed by the pixel region extends inparallel with the moving direction; and the first terminals are disposedat an outer side of the at least one of four sides so as to be arrangedalong the at least one of four sides.
 3. The film formation substrate asset forth in claim 1, wherein: the pixel region is a rectangular regionin which the plurality of pixels are arranged in a matrix; at least oneof four sides of a rectangle formed by the pixel region extends inparallel with the moving direction; and the second terminals areprovided (i) at an outer side of another side of the rectangle, whichanother side extends in a direction that intersects with the at leastone of four sides extending in parallel with the moving direction, and(ii) so as to extend along the another side.
 4. An organic EL displaydevice comprising: a film formation substrate recited in claim 1 onwhich the vapor deposition layers have been vapor-deposited, the vapordeposition layers including an organic EL layer made of an organic ELelement that emits light in response to an applied electric current. 5.The film formation substrate as set forth in claim 1, wherein the secondterminals are sealed in a sealing region.
 6. The film formationsubstrate as set forth in claim 1, wherein the first terminals areprovided outside a sealing region.
 7. The film formation substrate asset forth in claim 1, wherein the plurality of wires include a pluralityof gate lines and a plurality of source lines.
 8. The film formationsubstrate as set forth in claim 1, wherein the second terminals areexposed between the vapor deposition layers formed in a striped shape.9. The film formation substrate as set forth in claim 1, wherein thesecond terminals are provided outside the pixel region.
 10. The filmformation substrate as set forth in claim 1, wherein the vapordeposition layers are formed in a striped shape throughout the regionfrom one end to the other end of said film formation substrate in themoving direction in which said film formation substrate is movedrelative to the vapor deposition mask.
 11. The film formation substrateas set forth in claim 10, wherein the second terminals are provided (i)between the vapor deposition layers formed in the striped shape and (ii)outside the pixel region.
 12. The film formation substrate as set forthin claim 1, wherein the first terminals are disposed outside the pixelregion.